![]() There are some good introductions to LayoutEditor found on the official site at this page: The tutorial here tries to give you both background and some specifics on the LayoutEditor tool, and then goes on to provide some specific design details for e-beam designs. ![]() ![]() It will take time to learn the basics of CAD, the tool you're using, and which features to use to achieve your layout goal efficiently and effectively. Microfabrication CAD is complicated there are lots of tools and lots of options within those tools. Since this is my primary arena, I’m going to focus on EBL exposures, but I’ll mention mask shops at various points in this discussion as well. In this case, the data will be processed through a sophisticated software program called BEAMER (formerly LayoutBEAMER), from Genisys GMBH. Sent to the JEOL JBX-6300 E-Beam Lithography system for direct-writing on wafer.Each of these cases, as well as any other mask vendor, has a specific set of do's and don’ts for their system, dictated by the manufacturing tools and software they use, and the capabilities of their process. This might be the WNF's Heidelberg mask maker, or it might be an outside service such as FineLine or PhotoSciences. Sent to a mask making machine to generate a photomask you’ll use for a photolithography step.For our purposes, there are two primary paths your data will follow once it leaves the CAD system: The purpose of CAD in this context is to define which areas will be exposed during a lithography step and which areas will be left unexposed. CAD for Microfabrication using LayoutEditor
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |